Space and surface charge behavior analysis of plasma pre-processed dielectric thin films

Conference Record - IAS Annual Meeting (IEEE Industry Applications Society)

Volumn 3, Issue , 1997, Pages 2052-2057

  Takashima, Kazunori ^a   Oda, Tetsuji ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CHARGE MEASUREMENT; ELECTRIC CORONA; ELECTRIC SPACE CHARGE; PLASMA APPLICATIONS; PLASTIC FILMS; POLYTETRAFLUOROETHYLENES; SOLID STATE LASERS; SURFACE PHENOMENA; THIN FILMS; VINYL RESINS;

LASER INDUCED PRESSURE PULSE (LIPP); POLYVINYLIDENE FLUORIDE;

DIELECTRIC FILMS;

EID: 0031334562     PISSN: 01972618     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)