Argon gas breakdown with bare and insulated electrodes in dc-biased RF field

Journal of Physics D: Applied Physics

Volumn 32, Issue 14, 1999, Pages 1640-1645

  Shoji, M ^a   Sato, M ^a  

^a YAMAGATA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; COMPUTER SIMULATION; ELECTRIC BREAKDOWN OF GASES; ELECTRIC CURRENTS; ELECTRIC FIELDS; ELECTRIC INSULATION; ELECTRIC POTENTIAL; ELECTRODES; IONS; METALS; SECONDARY EMISSION;

BARE ELECTRODES; CHARGE PARTICLE BALANCE MODEL; INSULATED ELECTRODES;

ARGON;

EID: 0032660185     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/32/14/315     Document Type: Article

References (15)

1. Levitskii S M 1957 Zh. Tekh. Fiz. 27 970
2. Lisovsky V A and Yegorenkov V D 1994 J. Phys. D: Appl. Phys. 27 2340
3. Lisovskiy V A and Yegorenkov V D 1998 J. Phys. D: Appl. Phys. 31 3349
4. Kihara T 1952 Rev. Mod. Phys. 24 45
5. Sato M and Shoji M 1997 Japan. J. Appl. Phys. 36 5729
6. Shoji M and Sato M 1997 Appl. Phys. Lett. 71 3362
7. Shoji M and Sato M 1998 Trans. IEE Japan 118-A 936 (in Japanese)
8. Thompson B E and Sawin H H 1986 J. Appl. Phys. 60 89
9. Boeuf J P 1987 Phys. Rev. A 36 2782
10. Puech V and Torchin L 1986 J. Phys. D: Appl. Phys. 19 2309
11. Kücükarpaci H N and Lucas J 1981 J. Phys. D: Appl. Phys. 14 2001
12. Nakamura Y and Kurachi M 1988 J. Phys. D: Appl. Phys. 21 718
13. Ward A L 1958 Phys. Rev. 112 1852
14. Cobine J D 1958 Gaseous Conductors (New York: Dover)
15. Böhm C and Perrin J 1993 Rev. Sci. Instrum. 64 31