Erosion and deposition during the sputter cleaning of substrates prior to the cathodic arc evaporation of transition metal nitride coatings

Thin Solid Films

Volumn 349, Issue 1, 1999, Pages 176-185

  MacKenzie, M ^a   Craven, A J ^a   Hatto, P ^b  

^a UNIVERSITY OF GLASGOW   (United Kingdom)

^b Multi Arc UK   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; EROSION; EVAPORATION; INTERFACES (MATERIALS); ION BEAMS; MATHEMATICAL MODELS; NITRIDES; SPUTTER DEPOSITION; SUBSTRATES; TRANSITION METALS; TRANSMISSION ELECTRON MICROSCOPY; VAPOR DEPOSITION;

PHYSICAL VAPOR DEPOSITION; SPUTTER CLEANING;

THIN FILMS;

EID: 0032658961     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00219-9     Document Type: Article

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