Effect of laser parameters on the property of DLC films grown by pulsed laser deposition

Surface and Coatings Technology

Volumn 115, Issue 2-3, 1999, Pages 266-269

  Pang, S S ^a   Lee, S Y ^a   Jung, H S ^a   Park, H H ^a  

^a Yonsei University   (South Korea)

Author keywords

DLC; FED; Laser fluence; PL; PLD; Raman spectroscopy; SEM; Thin film

Indexed keywords

DEPOSITION; FILM GROWTH; LASER BEAM EFFECTS; PULSED LASER APPLICATIONS; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; THERMAL EFFECTS; THIN FILMS;

DIAMOND LIKE CARBON FILMS; PULSED LASER DEPOSITION;

AMORPHOUS FILMS;

EID: 0032654501     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00247-9     Document Type: Article

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