Angular distribution of particles sputtered from III-V compound semiconductors by Ar+-ion bombardment

Surface Science

Volumn 426, Issue 2, 1999, Pages 141-146

  Tanemura, M ^a   Ukita, M ^a   Okuyama, F ^a  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ION BOMBARDMENT; PARTICLES (PARTICULATE MATTER); PHOSPHORUS; SEMICONDUCTING GALLIUM COMPOUNDS; SEMICONDUCTING INDIUM COMPOUNDS; SPUTTERING; SURFACE PHENOMENA; SURFACE STRUCTURE;

ANGULAR DISTRIBUTION; GALLIUM PHOSPHIDE; INDIUM ARSENIDE; SURFACE SEGREGATION;

SEMICONDUCTOR MATERIALS;

EID: 0032654489     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(99)00174-0     Document Type: Article

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