Phase equilibria in In-Metal-As systems: systematic trends in phase diagram topology and implications for the development of contact materials to InAs

Journal of Electronic Materials

Volumn 28, Issue 7, 1999, Pages 894-901

  Swenson, D ^a  

^a Michigan Technological University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARSENIC; INDIUM; METALLIZING; PHASE DIAGRAMS; PHASE EQUILIBRIA; THERMODYNAMIC STABILITY; TOPOLOGY; TRANSITION METALS;

ARSENIDES; CONTACT MATERIALS; CONTACT METALLIZATIONS; INDIDES; NOBLE METAL;

TERNARY SYSTEMS;

EID: 0032654104     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-999-0216-6     Document Type: Article

References (42)

1. C.J. Palmstrøm and T. Sands, Contacts to Semiconductors: Fundamentals and Technology, ed. L. J. Brillson (Park Ridge, NJ: Noyes Publ., 1993).
2. A.G. Milnes and A.Y. Polyakov, Mater. Sci. Eng. B 18, 237 (1993).
3. V. Swaminathan, Indium Phosphide and Related Materials: Processing, Technology and Devices, ed. A. Katz (Boston, MA: Artech House, 1992).
4. S.E. Mohney, J. Electron. Mater. 27, 24 (1998).
5. D. Swenson and Y.A. Chang, Mater. Sci. Eng. B 39, 52 (1996).
6. A. Muller and M. Wilhelm, J. Phys. Chem. Solids 26, 2029 (1965).
7. G.F. Gubskaya, P.-N. Wang, N.P. Luzhnaya, and D.L. Kudryavtsev, Inorg. Mater. I 188 (1965).
8. M. El-Boragy and K. Schubert, Z. Metallkd. 70, 579 (1970).
9. C.T. Tsai and R.S. Williams, J. Mater. Res. 1, 352 (1986).
10. J. Klingbeil and R. Schmid-Fetzer, CALPHAD 18, 429 (1994).
11. D. Swenson, Sutopo, and Y.A. Chang, Mater. Chem. Phys. 44, 215 (1996).
12. D. Swenson, Sutopo, and Y.A. Chang, J. Alloys Comp. 216, 67 (1994).
13. D. Swenson, Sutopo, and Y.A. Chang, Z. Metall Ed. 85, 228 (1994).
14. D. Swenson and Y.A. Chang, Mater. Sci. Engin. B 39, 232 (1996).
15. D. Swenson and Y.A. Chang, Mater. Sci. Engin. B 22, 267 (1994).
16. Joint Committee on Powder Diffraction Standards (Newtown Square, PA: International Center for Diffraction Data).
17. T.B. Massalski, Binary Alloy Phase Diagrams, 2nd Edition (Materials Park, OH: ASM International, 1990).
18. M.D. Deal, R.A. Gasser, and D.A. Stevenson, J. Phys. Chem. Solids 46, 859 (1985).
19. M.F. Hagedorn and W. Jeitschko, J. Solid State Chem. 119, 344 (1995) and references contained therein.
20. R. Beyers, K.B. Kim, and R. Sinclair, J. Appl. Phys. 61, 2195 (1987).
21. O. Kubaschewski and C.B. Alcock, Metallurgical Thermochemistry, 5th ed. (Oxford, U.K.: Pergamon Press, 1979).
22. C. Chatillon, I. Ansara, A. Watson, and B.B. Argent, CALPHAD 14, 203 (1990).
23. J.J. Murray and R.D. Heyding, Can. J. Chem. 45, 2675 (1967).
24. M.E. Straumanis and S.M. Riad, Trans. Metall. Soc. AIME, 233, 964 (1965).
25. G.A. Eade and W. Hume-Rothery, Z. Metallkd. 50, 123 (1959).
26. R. Schmid-Fetzer, J. Electron. Mater. 17, 193 (1988).
27. F.R. de Boer, R. Boom, W.C.M. Mattens, A.R. Miedema, and A.K. Niessen, Cohesion in Metals: Transition Metal Alloys (Amsterdam, Netherlands: North-Holland Publishers, 1988).
28. Q. Han and R. Schmid-Fetzer, Mater. Sci. Engin. B 22, 141 (1994).
29. P. Anres, M. Gaune-Escard, E. Hayer, and J.P. Bros, J. Alloys Comp. 221, 143 (1995).
30. R. Hultgren, P.D. Desai, D.T. Hawkins, M. Geiser, and K. Kelley, Selected Values of the Thermodynamic Properties of Binary Alloys (Metals Park, OH: ASM, 1973).
31. N.A. Gokcen, Bull. Alloy Phase Diagr. 10, 11 (1989).
32. S. Meschel and O. Kleppa, J. Alloys Comp. 197, 75 (1993).
33. D. Swenson, Ph.D. Thesis, University of Wisconsin-Madison (1994).
34. J.Y. Josefowicz and D.B. Rensch, J. Vac. Sci. Technol. B 5, 1707 (1987).
35. D.Y. Chen, Y.A. Chang, D. Swenson, and F.R. Shepherd, J. Mater. Res. 13, 959 (1998).
36. J.S. Chen, A. Bachli, M.-A. Nicolet, L. Baud, C. Jaussaud, and R. Madar, Mater. Sci. Eng. B 29, 185 (1995).
37. A. Smirnov, P.A. Tove, J. de Sousa Pires, and H. Norde, Appl. Phys. Lett. 36, 313 (1980).
38. C.S. Petersson, J.E.E. Baglin, J.J. Dempsey, F.M. d'Heurle, and S.J. La Placa, J. Appl. Phys. 53, 4866 (1982).
39. S.E. Mohney and Y.A. Chang, Advanced Metallization and Processing for Semiconductor Devices and Circuits-II, ed. A. Katz, S.P. Murarka, Y.I. Nissim, and J.M.E. Harper (Pittsburgh, PA: Mater. Res. Soc., 1992), p. 519.
40. H.G. Fu and T.S. Huang, Solid-State Electron. 38, 89 (1995).
41. D.Y. Chen, Y.A. Chang, and D. Swenson, Appl. Phys. Lett. 68, 96 (1996).
42. D.B. Ingerly, Y.A. Chang, N.R. Perkins, and T.F. Kuech, Appl. Phys. Lett. 70, 108 (1997).