Plasmoid formation and multiple steady states in a low pressure, inductively coupled electronegative plasma

IEEE Transactions on Plasma Science

Volumn 27, Issue 1, 1999, Pages 60-61

  Economou, Demeter J ^a   Wise, Richard S ^a,b   Kubota, Alison A ^a  

^a University of Houston   (United States)

^b IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; CHLORINE; ELECTRONS; HYSTERESIS; IONS; PLASMA DENSITY; PLASMA ETCHING;

GASEOUS ELECTRONICS CONFERENCE; HIGH DENSITY PLASMA; INDUCTIVELY COUPLED PLASMA; PLASMA ELECTRONEGATIVITY;

PLASMAS;

EID: 0032651683     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.763035     Document Type: Article

References (10)

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