Striations in a radio frequency planar inductively coupled plasma

IEEE Transactions on Plasma Science

Volumn 24, Issue 1, 1996, Pages 125-126

  Stittsworth, J A ^b   Wendt, A E ^a,b  

^a IEEE

^b UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ASPECT RATIO; ELECTRIC DISCHARGES; ELECTRONS; LIGHT EMISSION; PHOTOGRAPHY;

ARGON PLASMA; AZIMUTHAL STRUCTURE; DISCHARGE UNIFORMITY; PLASMA GLOW; RADIOFREQUENCY PLANAR INDUCTIVELY COUPLED PLASMAS; STRIATIONS;

PLASMAS;

EID: 0030083712     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.491744     Document Type: Article

References (5)

1. L. J. Mahoney, A. E. Wendt, E. Barrios, C. J. Richards, and J. L. Shohet, "Electron density and energy distributions in a planar inductively coupled discharge," J. Appl. Phys., vol. 76, pp. 2041-2045, 1994.
2. J. A. Stittsworth and A. E. Wendt. "Chamber geometry and plasma uniformity in a planar inductively coupled radio frequency argon discharge," submitted to Plasma Sources Sci. Technol.
3. [31 V. I. Kolobov and V. A. Godyak, "Nonlocal electron kinetics in collisional gas discharge plasmas," IEEE Trans. Plasma Sci., vol. 23, no. 4, pp. 503-531, Aug. 1995.
4. Y. B. Golubovskii, V. I. Kolobov, and S. K. al-Hawat, "Anode region of low-current glow discharges at low and high pressures," Sov. Phys. Tech. Phys., vol. 35, pp. 747-749, 1990.
5. J. A. Meyer and A. E. Wendt, "Measurements of electromagnetic fields in a planar radio-frequency inductively coupled plasma source," J. Appl. Phys., vol. 78, pp. 90-96, 1996