Quantitative analysis of the oxygen content in BaTiO3 films deposited by PLD using 16O(α,α)16O resonant elastic scattering

Thin Solid Films

Volumn 340, Issue 1, 1999, Pages 68-71

  Li, Wei ^a,b   Lu, Fei ^a   Liu, Zhi Guo ^b   Zhu, Yong ^c   Wang, Feng Xiang ^a   Liu, Xiang Dong ^a   Tan, Chun Yu ^a   Wang, Ke Ming ^a,b  

^a SHANDONG UNIVERSITY   (China)

^b NANJING UNIVERSITY   (China)

^c INSTITUTE OF PHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; FILM PREPARATION; OXYGEN; PROBES; PULSED LASER APPLICATIONS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; STOICHIOMETRY;

DEPTH PROFILING; OXYGEN CONCENTRATION; RESONANT ELASTIC SCATTERING;

BARIUM TITANATE;

EID: 0032651601     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01342-X     Document Type: Article

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