Reshaping of single-crystal silicon microstructures

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 3 A, 1999, Pages 1580-1583

  Yang, Eui Hyeok ^a,b   Fujita, Hiroyuki ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

3 D structures; Dislocation motion; Reshaping technology; SDA; Self assembling

Indexed keywords

DISLOCATIONS (CRYSTALS); HEATING; PLASTIC DEFORMATION; SEMICONDUCTING SILICON; SINGLE CRYSTALS; STRESSES; THREE DIMENSIONAL;

JOULE HEATING; RESHAPING TECHNOLOGY; SINGLE CRYSTAL SILICON;

CRYSTAL MICROSTRUCTURE;

EID: 0032651553     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.1580     Document Type: Article

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