SCOPUS 정보 검색 플랫폼

Volumn 11, Issue 2, 1999, Pages 153-159

Remote network-based observation of fine structure in LSI using a UHV electron microscope

(5) Tomizawa, Masaaki a Ueki, Takemi a Takeda, Tadao a Kasai, Ryouta a Takaoka, Akio a

a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ASYNCHRONOUS TRANSFER MODE; ELECTRON MICROSCOPES; IMAGE COMPRESSION; INTEGRATED CIRCUIT MANUFACTURE; LSI CIRCUITS; TELECOMMUNICATION NETWORKS; TELEVISION SYSTEMS; TRANSMISSION ELECTRON MICROSCOPY;

GEMNET; MPEG 2; ULTRAHIGH VOLTAGE ELECTRON MICROSCOPE;

IMAGE COMMUNICATION SYSTEMS;

EID: 0032651259 PISSN: 09152334 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (3)

References (8)

1
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- Application of ultrahigh-voltage electron microscopy to research in materials for LSI devices
- A. Takaoka and H. Mori, "Application of ultrahigh-voltage electron microscopy to research in materials for LSI devices," OYO BUTURI, Vol. 63, pp. 382-385, 1994.
- (1994) OYO BUTURI , vol.63 , pp. 382-385
- Takaoka, A.¹ Mori, H.²

2
- 0345117735
- Application of ultrahigh voltage electron microscope analysis on the fine structure of ULSI
- K. Park and H. Yasuda, "Application of Ultrahigh Voltage Electron Microscope Analysis on the fine structure of ULSI," Electron Microscopy, Vol. 32, pp. 170-172, 1997.
- (1997) Electron Microscopy , vol.32 , pp. 170-172
- Park, K.¹ Yasuda, H.²

3
- 0343838460
- Remote observation system for UHVEM employing communication channels
- K. Yoshida, A. Takaoka, H. Nishihara, I. Matsui and S. Hayashi, "Remote Observation System for UHVEM Employing Communication Channels," Proceedings of 54th Annual Meeting of the Japanese society of Electron Microscopy, 13-II-945, 1998.
- (1998) Proceedings of 54th Annual Meeting of the Japanese Society of Electron Microscopy, 13-II-945
- Yoshida, K.¹ Takaoka, A.² Nishihara, H.³ Matsui, I.⁴ Hayashi, S.⁵

4
- 0344686922
- ISBN4-7561-0250-6, Ascii corp.
- H. Tominaga and H. Ishikawa Ed., "Text Book for ATM," ISBN4-7561-0250-6, Ascii corp., 1995.
- (1995) Text Book for ATM
- Tominaga, H.¹ Ishikawa, H.²

5
- 0027620012
- Topics in in-situ experiments in the HVM
- H. Mori and M. Komatsu, "Topics in in-situ experiments in the HVM," Ultramicroscopy, 51 pp. 31-40, 1993.
- (1993) Ultramicroscopy , vol.51 , pp. 31-40
- Mori, H.¹ Komatsu, M.²

6
- 0030080484
- Depth-resolved in-situ TEM observation of in a submicron-wide layered Al-0.5 % Cu line
- H. Okabayashi, M. Komatsu and H. Mori, "Depth-Resolved In-situ TEM Observation of in a Submicron-Wide Layered Al-0.5 % Cu Line," Jpn. J. Appl. Phys. Vol. 35 pp. 1102-1110, 1996.
- (1996) Jpn. J. Appl. Phys. , vol.35 , pp. 1102-1110
- Okabayashi, H.¹ Komatsu, M.² Mori, H.³

7
- 0345117736
- Developments of heat cell and thermal process equipment, and their applications for pseudo in-situ UHVEM observations of grown-in defect annealing
- T. Ueki, T. Takeda, K. Yoshida, A. Takaoka and S. Nakajima, "Developments of Heat Cell and thermal Process Equipment, and their Applications for Pseudo In-situ UHVEM Observations of Grown-in Defect Annealing," Proceedings of 54th Annual Meeting of the Japanese society of Electron Microscopy, 13-II-1200, 1998.
- (1998) Proceedings of 54th Annual Meeting of the Japanese Society of Electron Microscopy, 13-II-1200
- Ueki, T.¹ Takeda, T.² Yoshida, K.³ Takaoka, A.⁴ Nakajima, S.⁵

8
- 0344686921
- Failure microstructural analysis for LSIs
- T. Ueki, "Failure microstructural analysis for LSIs," Proceedings of the 42nd Symposium Japanese Society of Electron Microscopy, pp. 65-68, 1997.
- (1997) Proceedings of the 42nd Symposium Japanese Society of Electron Microscopy , pp. 65-68
- Ueki, T.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.