In situ ellipsometry studies of temperature-dependent Au thin-film growth

Thin Solid Films

Volumn 341, Issue 1, 1999, Pages 37-41

  Lee, S ^a   Hong, J ^a   Oh, S G ^a  

^a Ajou University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; GOLD; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; POLARIZATION; SILICON WAFERS; THERMAL EFFECTS; THIN FILMS;

DEPOLARIZATION FACTOR; EFFECTIVE MEDIUM APPROXIMATION; GROWTH MODEL; IN SITU ELLIPSOMETRY;

FILM GROWTH;

EID: 0032649714     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01540-5     Document Type: Article

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