Characteristics of proton-exchanged wet etching on z-cut nickel-indiffused lithium niobate

Microwave and Optical Technology Letters

Volumn 18, Issue 4, 1998, Pages 250-252

  Chang, W C ^a   Chang, S J ^b   Sue, C Y ^a   Hsu, C L ^a  

^a TAMKANG UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Integrated optics; Lithium niobate waveguide; Proton exchange; Wet etching

Indexed keywords

ETCHING; INTEGRATED OPTICS; LITHIUM COMPOUNDS; NICKEL; PROTONS;

PROTON EXCHANGE; RIDGE TYPE WAVEGUIDES;

OPTICAL WAVEGUIDES;

EID: 0032121565     PISSN: 08952477     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1098-2760(199807)18:4<250::AID-MOP4>3.0.CO;2-D     Document Type: Article

References (12)

1. M. N. Armenise, "Fabrication Techniques of Lithium Niobate Waveguides," Inst. Elect. Eng. Proc., Pt. J, 1982, pp. 1121-1131.
2. 3 Optical Modulator with Ridge Structure," Electron. Lett., Vol. 30, 1994, pp. 946-950.
3. B. Sopori, C. M. Phillips, and W. W. C. Chang, "Efficient Optical Waveguide Coupler," Appl. Opt., Vol. 19, 1980, pp. 790-801.
4. 3," Appl. Phys. Lett., Vol. 35, 1979, pp. 756-758.
5. 3," Appl. Phys. Lett., Vol. 38, 1981, pp. 907-909.
6. F. Laurell, J. Webjorn, G. Arvidsson, and J. Holmberg, "Wet Etching of Proton-Exchanged Lithium Niobate - a Novel Processing Technique," J. Lightwave Technol., Vol. 10, 1992, pp. 1606-1609.
7. R. S. Cheng, W. L. Cheng, and W. S. Wang, "Mach-Zehnder Modulators with Lithium Niobate Ridge Waveguides by Proton-Exchanged Wet-Etch and Nickel Indiffusion," IEEE Photon. Technol. Lett., Vol. 7, Nov. 1995, pp. 1282-1284.
8. J. Webjörn, F. Laurell, and G. Arvidsson, "Fabrication of Periodically Domain-Inverted Channel Waveguides in Lithium Niobate for Second Harmonic Generation," J. Lightwave Technol., Vol. 7, Oct. 1989, pp. 1597-1601.
9. 3 Optical Waveguide," J. Appl. Phys., Vol. 50, 1979, pp. 4599-4603.
10. W. L. Chen, R. S. Cheng, J. H. Lee, and W. S. Wang, "Lithium Niobate Ridge Waveguides by Nickel Diffusion and Proton-Exchanged Wet Etching," IEEE Photon. Technol. Lett., Vol. 7, Nov. 1995, pp. 1318-1320.
11. Y. P. Liao, D. J. Chen, R. C. Lu, and W. S. Wang, "Nickel-Diffused Lithium Niobate Optical Waveguide with Process-Dependent Polarization," IEEE Proton. Technol. Lett., Vol. 8, Apr. 1996, pp. 548-550.
12. R. S. Cheng, T. J. Wang, and W. S. Wang, "Wet-Etched Ridge Waveguide in Y-Cut Lithium Niobate," J. Lightwave Technol., Vol. 15, Oct. 1997, pp. 1880-1887