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Volumn 444, Issue , 1997, Pages 3-13
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Technology for microassembling
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Author keywords
[No Author keywords available]
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Indexed keywords
BOND STRENGTH (MATERIALS);
FABRICATION;
JOINING;
MATERIALS HANDLING;
MICROELECTROMECHANICAL DEVICES;
PROCESSING;
ROBOT APPLICATIONS;
STABILITY;
TECHNOLOGY;
MICROASSEMBLING PROCESS;
MICROELEMENTS;
MICROROBOTIC SYSTEMS;
MICROSYSTEMS;
MICROELECTRONIC PROCESSING;
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EID: 0030715399
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (1)
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References (18)
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