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Volumn 37, Issue 5, 1999, Pages 843-846

Chromium in amorphous hydrogenated carbon based thin films prepared in a PACVD process

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CARBIDES; CERMETS; CHROMIUM; CHROMIUM COMPOUNDS; DIFFUSION IN SOLIDS; ELECTRONIC DENSITY OF STATES; ELECTRONIC STRUCTURE; FERMI LEVEL; FILM GROWTH; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILMS;

EID: 0032640210     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0008-6223(98)00282-6     Document Type: Article
Times cited : (11)

References (6)
  • 3
    • 0344593061 scopus 로고
    • Sputtering by particle bombardment/sputtering Yield measurements
    • editor, Andersen H.H., contributor
    • Behrisch R., editor, Andersen H.H., contributor. Sputtering by particle bombardment/sputtering Yield measurements In: Springer-Topics in Applied Physics, 1981-1991.
    • (1981) In: Springer-Topics in Applied Physics
    • Behrisch, R.1
  • 5
    • 24844437815 scopus 로고
    • Electronic density of states and deep defects of hydrogenated amorphous carbon (a-C:H)
    • Portugal
    • Schäfer J., Ristein J., Ley L., Electronic density of states and deep defects of hydrogenated amorphous carbon (a-C:H). In: Diamond Films, Portugal 1993.
    • (1993) In: Diamond Films
    • Schäfer, J.1    Ristein, J.2    Ley, L.3
  • 6
    • 0032003070 scopus 로고    scopus 로고
    • Cylindrical spike model for the formation of diamondlike thin films by ion deposition
    • Hofsäss H., Feldermann H., Merk R., Sebastian M., Ronning C. Cylindrical spike model for the formation of diamondlike thin films by ion deposition. Appl. Phys. A. 66:1998;153.
    • (1998) Appl. Phys. A. , vol.66 , pp. 153
    • Hofsäss, H.1    Feldermann, H.2    Merk, R.3    Sebastian, M.4    Ronning, C.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.