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Volumn 37, Issue 5, 1999, Pages 843-846
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Chromium in amorphous hydrogenated carbon based thin films prepared in a PACVD process
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS FILMS;
CARBIDES;
CERMETS;
CHROMIUM;
CHROMIUM COMPOUNDS;
DIFFUSION IN SOLIDS;
ELECTRONIC DENSITY OF STATES;
ELECTRONIC STRUCTURE;
FERMI LEVEL;
FILM GROWTH;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
THIN FILMS;
AMORPHOUS HYDROGENATED CARBON FILMS;
CHROMIUM CARBIDE;
CARBON;
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EID: 0032640210
PISSN: 00086223
EISSN: None
Source Type: Journal
DOI: 10.1016/S0008-6223(98)00282-6 Document Type: Article |
Times cited : (11)
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References (6)
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