Luminescence in hydrogenated amorphous carbon films grown by dc saddle-field glow-discharge decomposition of methane

Journal of Applied Physics

Volumn 79, Issue 5, 1996, Pages 2684-2688

  Gaspari, F ^a   Kruzelecky, R V ^a,b   Lim, P K ^a,c   Sidhu, L S ^a   Zukotynski, S ^a  

^a UNIVERSITY OF TORONTO   (Canada)

^b MPB COMMUNICATIONS INC   (Canada)

^c HONG KONG BAPTIST UNIVERSITY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CARBON MONOXIDE; CHEMICAL BONDS; DECOMPOSITION; GLASS; GLOW DISCHARGES; INFRARED SPECTROSCOPY; METHANE; PHOTOLUMINESCENCE; SILICON;

CARBON HYDROXIDE BONDS; DC SADDLE FIELD GLOW DISCHARGE; HYDROGENATED AMORPHOUS CARBON;

AMORPHOUS FILMS;

EID: 0030107408     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.361139     Document Type: Article

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