Features of the film-growth conditions by cross-beam pulsed-laser deposition

Applied Physics A: Materials Science and Processing

Volumn 69, Issue 3, 1999, Pages 353-358

  Tselev, A ^a   Gorbunov, A ^a   Pompe, W ^a  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; IONIZATION OF SOLIDS; KINETIC ENERGY; PULSED LASER APPLICATIONS; SPUTTER DEPOSITION;

CROSS BEAM PULSE LASER DEPOSITION (CBPLD);

FILM GROWTH;

EID: 0032635612     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390051013     Document Type: Article

References (24)

1. K.H. Guenther: Proc. SPIE 1324, 2 (1990)
2. S. Esch, M. Bott, T. Michely, G. Comsa: Appl. Phys. Lett. 67, 3209 (1995)
3. H. Jenniches, M. Klaua, H. Höche, J. Kirschner: Appl. Phys. Let. 69, 3339 (1996)
4. A.D. Akhsakhalyan, Yu.A. Bityurin, S.V. Gaponov, A.A. Gudkov, V.I. Luchin: Sov. Phys.-Tech. Phys. 27, 969 (1982)
5. L.-C. Chen: In Pulsed Laser Deposition of Thin Films, ed. by D.B. Chrisey, G.K. Hubler (Wiley, New York 1994) pp. 167-198
6. C. Belouet: Appl. Surf. Sci. 96-98, 630 (1996)
7. A.A. Gorbunov, W. Pompe, A. Sewing, S.V. Gaponov, A.D. Akhsakhalyan, I.G. Zabrodin, I.A. Kaskov, E.B. Klyenkov, A.P. Morozov, N.N. Salaschenko, R. Dietsch, H. Mai, S. Völmar: Appl. Surf. Sci. 96-98, 649 (1996)
8. J. Noetzel, H. Geisler, K. Brand, A. Gorbunov, A. Tselev, M. Dobler, E. Wieser, W. Möller: Appl. Phys. A 68, 497 (1999)
9. H. Geisler, A. Mensch, A. Gorbunov, A. Tselev, J. Noetzel, K. Brand, H. Worch: submitted to Zeitschrift für Metallkunde
10. J.D. Swift, M.J.R. Schwar: Electric Probes for Plasma Diagnostics (Iliffe Books, London 1971)
11. D.B. Geohegan: In Pulsed Laser Deposition of Thin Films, ed. by D.B. Chrisey, G.K. Hubler (Wiley, New York 1994) pp. 116-165
12. A.D. Akhsakhalyan, S.V. Gaponov, V.I. Luchin, A.P. Chirimanov: Sov. Phys.-Tech. Phys. 33, 1146 (1988)
13. A.A. Gorbunov, V.I. Konov: Sov. Phys.-Tech. Phys. 34, 1271 (1989)
14. J.B. Hasted: Physics of Atomic Collisions (Butterworth, London 1972)
15. L.E. Leuchtner: Appl. Surf. Sci. 127-129, 626 (1998)
16. J.C.S. Kools, S.H. Brongersma, E. van de Riet, J. Dileman: Appl. Phys. B 53, 125 (1991)
17. Yu.A. Bykovsky, N.M. Degtyarenko, V.F. Yelesin, Yu.P. Kozyrev, S.M. Silnov: Zh. Eksperimentalnoj i Tereticheskoj Fiziki 60, 1306 (1971) (in Russian)
18. R. Jordan, D. Cole, J.G. Lunney, K. Mackay, D. Givord: Appl. Surf. Sci. 86, 24 (1995)
19. S. Amoruso, A. Amodeo, V. Berardi, R. Bruzzese, N. Spinelli, R. Velotta: Appl. Surf. Sci. 96-98, 175 (1996)
20. M. von Ardenne: Tabellen zur angewandten Physik, I. Band (VEB Deutscher Verlag der Wissenschaft, Berlin 1979) p. 111
21. V.P. Ageev, A.D. Akhsakhalyan, S.V. Gaponov, A.A. Gorbunov, V.I. Konov, V.I. Luchin: Sov. Phys.-Tech. Phys. 33, 562 (1988)
22. M. Ozegowski, K. Meteva, S. Metev, G. Sepold: Appl. Surf. Sci. 138-139, 68 (1999)
23. A. Gorbunov, A. Tselev, W. Pompe: Proc. SPIE 3688, 351 (1999)
24. P.C. Zalm: J. Vac. Sci. Technol. B 2, 151 (1984)