Negative and positive tone protein patterning on e-beam/deep-UV resists

Langmuir

Volumn 15, Issue 11, 1999, Pages 3845-3851

  Nicolau, Dan V ^a,b   Taguchi, Takahisa ^a   Taniguchi, Hiroshi ^a   Yoshikawa, Susumu ^a  

^a OSAKA NATIONAL RESEARCH INSTITUTE   (Japan)

^b Rio Tinto Limited Australia   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; COPOLYMERS; ELECTRON BEAM LITHOGRAPHY; HYDROPHOBICITY; POLYACRYLATES; POLYMETHYL METHACRYLATES; RADIATION EFFECTS;

POLYTERTBUTYL METHACRYLATES;

PROTEINS;

EID: 0032633874     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la980914n     Document Type: Article

References (19)

1. Bhatia, S. K.; Teixeira, J. T.; Anderson, M.; Shriver-Lake, L. C.; Calvert, J. M.; Georger, J. H.; Hickman, J. H.; Dulcey, C. S.; Schoen, P. E.; Ligler, F. S. Anal. Biochem. 1989, 178, 197.
2. Connolly, P.; Cooper, J.; Moores, G. R.; Shen, J.; Thomson, G. Nanotechnology 1991, 2, 160.
3. Bhatia, S. K.; Hickman, J. J.; Ligler, F. S. J. Am. Chem. Soc. 1992, 114, 4432.
4. Hong, J. D.; Lowack, K.; Schmitt, J.; Decher, G. Prog. Colloid Polym. Sci. 1993, 102, 93.
5. Pritchard, D. J.; Morgan, H.; Cooper, J. M. Angew. Chem., Int. Ed. Engl. 1995, 34, 91.
6. Mrksich, M.; Chen, C. S.; Xia, Y.; Dike, L. E.; Ingber, D. E.; Whitesides, G. M. Proc. Natl. Acad. Sci. U.S.A. 1996, 93 (20), 10775.
7. Chen, C. S.; Mrksich, M.; Huang, S.; Whitesides, G. M.; Ingber, D. E. Science 1997, 276, 1425.
8. Morgan, H.; Pritchard, D. J.; Cooper, J. M. Biosens. Bioelectron. 1995, 10, 841. St John, P. M.; Davis, R.; Cady, N.; Czajka, J.; Batt, C. A.; Craighead, H. G. Anal. Chem. 1943, 15, 1108.
9. Morgan, H.; Pritchard, D. J.; Cooper, J. M. Biosens. Bioelectron. 1995, 10, 841. St John, P. M.; Davis, R.; Cady, N.; Czajka, J.; Batt, C. A.; Craighead, H. G. Anal. Chem. 1943, 15, 1108.
10. Gallup, M. A.; Barrett, R. W.; Dower, W. J.; Fodor, S. P. A.; Gordon, E. M. J. Med. Chem. 1994, 37, 1233.
11. Fodor, S. P. A.; Read, J. L.; Pirrung, M. C.; Stryer, L.; Lu, A. T.; Solas, D. Science 1991, 251, 767.
12. McGall, G.; Labadie, J.; Brock, P.; Wallraff, G.; Nguyen, T.; Hinsberg, W. Proc. Natl. Acad. Sci. U.S.A. 1996, 93, 13555.
13. Nicolau, D. V.; Taguchi, T.; Taniguchi, H.; Yoshikawa, S. Langmuir 1998, 14, 1927.
14. Gipstein, E.; Ainslie, H.; Levine, H. A. U.S. Patent 3,779,806, 1973.
15. Cortellino, C. A.; Gipstein, E.; Hewett, W. A.; Johnson, D. E.; Moreau, W. M. U.S. Patent 3,996,393, 1976.
16. Miller, L. J.; Brault, R. G.; Granger, D. D.; Jensen, J. E.; Van Ast, C. I.; Lewis, M. M. J. Vac. Sci. Technol., B 1989, 7, 68.
17. Allen, R. D.; Wallraff, G. M.; Hinsberg, W. D.; Simpson, L. L.; Kunz, R. R. Methacrylate Terpolymer Approach in the Design of a Family of Chemically Amplified Positive Resists. In Polymers for Microelectronics; Thompson, L., Willson, C. G., Tagawa, S., Eds.; ACS Symposium Series 537; American Chemical Society: Washington, DC, 1994; Chapter 11.
18. Hatzakis, M. J. Electrochem. Soc. 1969, 116, 1033.
19. Leckband, D. E. Adv. Biophys. 1997, 34, 173-190.