Morphology of sputter deposited Al alloy films

Thin Solid Films

Volumn 340, Issue 1, 1999, Pages 306-316

  Onishi, Takashi ^a   Iwamura, Eiji ^a   Takagi, Katsutoshi ^a  

^a Kobe Stl Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM ALLOYS; ANNEALING; CRYSTAL ORIENTATION; ELASTICITY; LIQUID CRYSTAL DISPLAYS; MICROSTRUCTURE; MORPHOLOGY; SPUTTER DEPOSITION; STRESSES; TEXTURES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

ALUMINUM ALLOY FILM; FIBER TEXTURE;

METALLIC FILMS;

EID: 0032633544     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01466-7     Document Type: Article

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