Partial pressure of phosphorus and arsenic vapor measured by raman scattering

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 2 B, 1999, Pages 989-991

  Roth, Katrin ^a   Kortus, Jens ^a   Herms, Martin ^a,c   Porezag, Dirk ^b   Pederson, Mark R ^b  

^a University of Mining and Technology   (Germany)

^b NAVAL RESEARCH LABORATORY   (United States)

^c KYOTO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Annealing; Crystal growth; Partial pressure; Raman scattering; Vapor

Indexed keywords

ANNEALING; ARSENIC; CRYSTAL GROWTH; ELECTRIC PROPERTIES; PARTIAL PRESSURE; PHOSPHORUS; PRESSURE MEASUREMENT; SURFACE PROPERTIES; TEMPERATURE; THERMODYNAMIC PROPERTIES; VAPOR PRESSURE;

IN SITU RAMAN SCATTERING; VAPOR ATMOSPHERE;

RAMAN SPECTROSCOPY;

EID: 0032633501     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.989     Document Type: Article

References (18)

1. J. Nishizawa: J. Cryst. Growth 99 (1990) 1.
2. O. Oda, H. Yamamoto, M. Seiwa, G. Kano, T. Inoue, M. Mori, H. Shimakura and M. Oyake: Semicond. Sc. Technol. 7 (1992) A215.
3. O. Oda, M. Ushida, K. Kainosho and M. Ohta: Proc. IPRM'97, Hyannis, MA (1997) p. 404.
4. K. K. Shin, J. W. Allen and G. L. Pearson: J. Phys. Chem. Solids 29 (1968) 379.
5. C. H. Wu and K. C. Hsieh: J. Appl. Phys. 72 (1992) 5642.
6. B. V. Dutt, A. K. Chin, I. Camlibel and W. A. Bonner: J. Appl. Phys. 56 (1984) 1630.
7. J. C. Garcia, C. Neri and J. Massies: J. Cryst. Growth 98 (1989) 511.
8. S. Chichibu, N. Ohkubo and S. Matsumoto: J. Appl. Phys. 64 (1988) 3987.
9. S. Hildebrandt, J. Schreiber, W. Kirchner and R. Kuzmenko: Appl. Surf. Sci. 63 (1993) 153.
10. W. Haussier, D. Römer and M. Plihal: Siemens Forsch.- & Entwickl.-Ber. 17 (1988) 177.
11. M. Herms, K. Roth and G. Inner: J.Cryst. Growth 186 (1998) 166.
12. J. Kortus, K. Roth, M. Herms, D. Porezag and M. R. Pederson: Proc. IPRM'98, IEEE Catalog #98CH36129, p. 533.
13. K. A. Jackson and M. R. Pederson: Phys. Rev. B 42 (1990) 3276.
14. M. R. Pederson and K. A. Jackson: Phys. Rev. B 43 (1991) 7312.
15. M. R. Pederson and K. A. Jackson: Density Functional Methods in Chemistry, eds. J.K. Labanowski and J.W. Andzehn (Springer Verlag, Berlin, 1991)
16. D. Porezag: Ph.D. thesis, Technical University Chemnitz, 1997.
17. Y. M. Bosworth, R. J. H. Clark and D. M. Rippon: J. Mol. Spectrosc. 46 (1973) 240.
18. GTT-Technologies, Gesellschaft für Technische Thermochemie und physik mbH, Kaiserstr. 100, 52134 Herzogenrath 3, Germany