SCOPUS 정보 검색 플랫폼

Journal of Materials Research

Volumn 14, Issue 4, 1999, Pages 1581-1588

Al-Ta bilayer as an oxidation resistant barrier for electrode structures in high dielectric constant capacitors

(2) Grill, A a Cabral Jr , C a

a IBM T J WATSON RESEARCH CENTER (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; AUGER ELECTRON SPECTROSCOPY; CRYSTALLIZATION; DIFFUSION; ELECTRIC VARIABLES MEASUREMENT; OXIDATION RESISTANCE; PERMITTIVITY; PROBES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; X RAY DIFFRACTION ANALYSIS;

ALUMINUM TANTALUM ALLOY; ELECTRODE STRUCTURE; FOUR POINT PROBE ELECTRICAL MEASUREMENT; HIGH DIELECTRIC CONSTANT CAPACITORS; OXIDATION RESISTANT BARRIER;

ALUMINUM ALLOYS;

EID: 0032632290 PISSN: 08842914 EISSN: None Source Type: Journal
DOI: 10.1557/JMR.1999.0212 Document Type: Article

Times cited : (5)

References (11)

1
- 84886448049
- R. B. Khamankar, M. A. Kressley, M. R. Visokay, T. Moise, S. Nemoto, Y. Okuno, S. J. Fang, A. M. Wilson, J. F. Gaynor, D. L. Crenshaw, S. R. Summerfelt, and L. Colombo, IEDM 1997, 245 (1997).
- (1997) IEDM 1997 , pp. 245
- Khamankar, R.B.¹ Kressley, M.A.² Visokay, M.R.³ Moise, T.⁴ Nemoto, S.⁵ Okuno, Y.⁶ Fang, S.J.⁷ Wilson, A.M.⁸ Gaynor, J.F.⁹ Crenshaw, D.L.¹⁰ Summerfelt, S.R.¹¹ Colombo, L.¹²

2
- 25044479335
- E. Fujii, T. Otsuki, Y. Judai, Y. Shimada, M. Azuma, Y. Uemoto, Y. Nagano, T. Nasu, Y. Izutsu, A. Maysuda, K. Nakao, K. Tanaka, K. Hirano, T. Ito, T. Mikawa, T. Kutsumai, L. d. McMillan, C. A. Paz de Araujo, IEDM 1997, 597 (1997).
- (1997) IEDM 1997 , pp. 597
- Fujii, E.¹ Otsuki, T.² Judai, Y.³ Shimada, Y.⁴ Azuma, M.⁵ Uemoto, Y.⁶ Nagano, Y.⁷ Nasu, T.⁸ Izutsu, Y.⁹ Maysuda, A.¹⁰ Nakao, K.¹¹ Tanaka, K.¹² Hirano, K.¹³ Ito, T.¹⁴ Mikawa, T.¹⁵ Kutsumai, T.¹⁶ McMillan, L.D.¹⁷ Paz De Araujo, C.A.¹⁸

3
- 0026982218
- A. Grill, W. Kane, J. Viggiano, M. Brady, and R. Laibowitz, J. Mater. Res. 7, 3260 (1992).
- (1992) J. Mater. Res. , vol.7 , pp. 3260
- Grill, A.¹ Kane, W.² Viggiano, J.³ Brady, M.⁴ Laibowitz, R.⁵

4
- 0011678761
- K. L. Saenger, A. Grill, and D. E. Kotecki, J. Appl. Phys. 83, 802 (1998).
- (1998) J. Appl. Phys. , vol.83 , pp. 802
- Saenger, K.L.¹ Grill, A.² Kotecki, D.E.³

5
- 0032002343
- K. L. Saenger, A. Grill, and C. Cabral, Jr., J. Mater. Res. 13, 462 (1998).
- (1998) J. Mater. Res. , vol.13 , pp. 462
- Saenger, K.L.¹ Grill, A.² Cabral C., Jr.³

6
- 85038058193
- U.S. Patent 5,504,041, Apr. 02 1996
- S. R. Summerfelt, U.S. Patent 5,504,041, Apr. 02 1996.
- Summerfelt, S.R.¹

7
- 0031190980
- T. Hara, M. Tanaka, K. Sakiyama, S. Onishi, K. Ishihara, and J. Kudo, Jpn. J. Appl. Phys. 36, L893 (1997).
- (1997) Jpn. J. Appl. Phys. , vol.36
- Hara, T.¹ Tanaka, M.² Sakiyama, K.³ Onishi, S.⁴ Ishihara, K.⁵ Kudo, J.⁶

8
- 85038063012
- U.S. Patent 5,576,579, Nov. 16 1996 (date filed: Jan. 12, 1995)
- P. D. Agnello, C. Cabral, Jr., A. Grill, C. Jahnes, T. T. Licata, and A. R. Roy, U.S. Patent 5,576,579, Nov. 16 1996 (date filed: Jan. 12, 1995).
- Agnello, P.D.¹ Cabral C., Jr.² Grill, A.³ Jahnes, C.⁴ Licata, T.T.⁵ Roy, A.R.⁶

9
- 0032680812
- A. Grill, C. Jahnes, and C. Cabral, Jr., J. Mater. Res. 14, 1604 (1999).
- (1999) J. Mater. Res. , vol.14 , pp. 1604
- Grill, A.¹ Jahnes, C.² Cabral C., Jr.³

10
- 85038056767
- U.S. Patent 5,625,233, Apr. 29 1997 (date filed: Jan. 13, 1995)
- C. Cabral, Jr., E. Colgan, and A. Grill, U.S. Patent 5,625,233, Apr. 29 1997 (date filed: Jan. 13, 1995).
- Cabral C., Jr.¹ Colgan, E.² Grill, A.³

11
- 0344142924
- D. Beach, R. Laibowitz, T. Shaw, A. Grill, and W. Kane, Int. Ferroelectrics 4, 535 (1994).
- (1994) Int. Ferroelectrics , vol.4 , pp. 535
- Beach, D.¹ Laibowitz, R.² Shaw, T.³ Grill, A.⁴ Kane, W.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.