Study of polysilicon produced by solid phase crystallization of hydrogenated amorphous silicon deposited at high rate

Solid State Phenomena

Volumn 67, Issue , 1999, Pages 217-222

  Farhi, G ^a   Aoucher, M ^a   Mohammed Brahim, T ^b  

^a UNIVERSITY OF SCIENCES AND TECHNOLOGY HOUARI BOUMEDIENE   (Algeria)

^b UNIVERSITÉ DE RENNES 1   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; ANNEALING; CRYSTAL ORIENTATION; CRYSTALLIZATION; HYDROGENATION; MAGNETRON SPUTTERING; PHOTOCONDUCTIVITY; QUARTZ; SEMICONDUCTING FILMS; THICK FILMS; X RAY CRYSTALLOGRAPHY;

HYDROGENATED AMORPHOUS SILICON FILMS;

SEMICONDUCTING SILICON;

EID: 0032629028     PISSN: 10120394     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.4028/www.scientific.net/ssp.67-68.217     Document Type: Article

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