Crystallization of hydrogenated amorphous silicon deposited at high rate by dc magnetron sputtering

Journal of Non-Crystalline Solids

Volumn 227-230, Issue PART 2, 1998, Pages 958-961

  Aoucher, M ^a   Farhi, G ^a   Mohammed Brahim, T ^a  

^a UNIVERSITY OF SCIENCES AND TECHNOLOGY HOUARI BOUMEDIENE   (Algeria)

Author keywords

dc Magnetron sputtering; Hydrogenated amorphous silicon films; Thermal annealing

Indexed keywords

ACTIVATION ENERGY; AMORPHOUS FILMS; ANNEALING; CRYSTAL GROWTH; CRYSTALLIZATION; ELECTRIC CONDUCTIVITY OF SOLIDS; MAGNETRON SPUTTERING; NUCLEATION; QUARTZ; SUBSTRATES;

ARRHENIUS REPRESENTATION;

AMORPHOUS SILICON;

EID: 0032068681     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(98)00246-4     Document Type: Article

References (18)

1. H.P. Strunk, J.H. Werner, B. Fortin, O. Bonnaud (Eds.), Solid State Phenomena, Polycrystalline Semiconductors III, Physics and Technology, Vol. 37-38, Scitec Publications, 1994.
2. T. Kretz, Thesis Université Louis Pasteur, Strasbourg France, 1993.
3. Mohammed-Brahim, A. Rahal, N. Ababou, N. Beldi, M. Aoucher, D. Mencaraglia, C. Longeaud, J.P. Kleider, O. Glodt, Z. Djebour. Proceedings of the 10th European Photovoltaic Solar Energy Conference, Lisbon, 1991.
4. M. Avrami, J. Chem. Phys. 9 (1941) 177.
5. M. Avrami, J. Chem. Phys. 8 (1940) 212.
6. W.A. Johnson, R.F. Mehl, Trans. Am. Inst. Min. Metall. Pet. Eng. 135 (1939) 416.
7. R. Landaeur, J. Appl. Phys. 23 (1952) 779.
8. V. Erukhimovitch, J. Baram, Phys. Rev. 50 (9) (1994) 5854.
9. E.F. Kenneedy, L. Cspregi, J.W. Mayer, T.W. Sigmon, J. Appl. Phys. 48 (1977) 4241.
10. K. Zellama, P. Germain, S. Squelard, J.C. Bourgoin, J. Appl. Phys. 50 (11) (1979) 6995.
11. A. Lietoila, A. Wakita, T.W. Sigmon, J.F. Gibbons, J. Appl. Phys. 53 (1982) 4399.
12. R. Bisaro, J. Magarino, K. Zellama, S. Squelard, P. Germain, J.F. Morhanger, Phys. Rev. B 31 (1985) 3568.
13. G.L. Olson, J.A. Roth, Mater. Sci. Rep. 3 (1988) 1.
14. R. Bisaro, J. Magarino, Y. Pasol, P. Germain, K. Zellama, Phys. Rev. B 40 (1989) 7655.
15. S. Roodar, W.C. Sinke, J.M. Poate, D.C. Jacobson, S. Dierker, B.S. Dennis, D.J. Eaglesham, F. Spaepen, P. Fuoss, Phys. Rev. B 44 (1991) 3702.
16. T. Mohammed-Brahim, M. Sarret, D. Briand, K. Kis-Sion, L. Haji, O. Bonnaud, D. Louër, A. Hadjadj, Philos. Mag. B, August, 1997.
17. T. Mohammed-Brahim, K. Kis-Sion, D. Briand, M. Sarret, O. Bonnaud, J.P. Kleider, C. Longeaud, B. Lambert, J. Non-Cryst. Solids 227-230 (1998) 962.
18. A. Rahal, N. Beldi, T. Mohammed-Brahim, C. Longeaud, Z. Djebbour, J.P. Kleider, D. Mencaraglia, 12th European Photovoltaic Solar Energy Conference Proc., 378, 1994.