Two-axis detection resonant accelerometer based on rigidity change

Sensors and Actuators, A: Physical

Volumn 75, Issue 1, 1999, Pages 53-59

  Tabata, Osamu ^a   Yamamoto, Takeshi ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROMACHINING; RESONATORS; SIGNAL DETECTION;

PARALLEL BEAM RESONATORS; TWO AXIS DETECTION RESONANT ACCELEROMETERS;

MICROSENSORS;

EID: 0032627633     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00014-X     Document Type: Article

References (6)

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3. Y. Omura, Y. Nonomura, O. Tabata, New resonant accelerometer based on rigidity change, Transducers, 1997, pp. 855-858.
4. Omura Y., Nonomura Y., Tabata O. A surface micromachined resonant accelerometer based on rigidity change. Trans. IEE Jpn. 118/E(9):1998;413-419.
5. T.A. Roessig, R.T. Howe, A.P. Pisano, J.H. Smith, Surface-micromachined resonant accelerometer, Transducers, 1997, pp. 859-862.
6. Practical Dictionary of Materials, 1984, pp. 260 (in Japanese).