Formation of pyramids at surface of TMAH etched silicon

Applied Surface Science

Volumn 144-145, Issue , 1999, Pages 472-475

  Choi, W K ^a   Thong, J T L ^a   Luo, P ^a   Bai, Y ^a   Tan, C M ^a   Chua, T H ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Etching parameters; Pyramids; Silicon; Tetramethylammonium hydroxide (TMAH)

Indexed keywords

AMMONIUM COMPOUNDS; CRYSTAL GROWTH FROM MELT; PH EFFECTS; SILICON; SURFACE PHENOMENA; TEMPERATURE;

PH THEORY; PYRAMIDS; TETRAMETHYLAMMONIUM HYDROXIDE;

ETCHING;

EID: 0032626836     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00842-3     Document Type: Article

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