Integrated optical refractometer based on waveguide bend loss

Journal of Lightwave Technology

Volumn 17, Issue 5, 1999, Pages 857-864

  Veldhuis, G J ^a   Van Der Veen, L E W ^b   Lambeck, P V ^b  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

^b UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VARIABLES CONTROL; FABRICATION; OPTICAL SENSORS; OPTICAL WAVEGUIDES; PROCESS CONTROL; REFRACTIVE INDEX; SILICON COMPOUNDS; SOLUTIONS;

CHEMICAL CONCENTRATION; OPTICAL REFRACTOMETER; WAVEGUIDE BEND LOSS;

REFRACTOMETERS;

EID: 0032625707     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/50.762904     Document Type: Article

References (10)

1. "Micro-optical technologies for measurement, sensors, and microsystems II & Optical fiber sensor technologies and applications," Proc. SPIE, vol. 3099, 1997.
2. Mesa Monograph: Micro Total Analysis Systems, A. van den Berg and P. Bergveld, Eds. Dordrecht, The Netherlands: Kluwer Academic, 1994.
3. G. J. Veldhuis and P. V. Lambeck, "Highly-sensitive passive integrated optical spiral-shaped waveguide refractometer," Appl. Phys. Lett., vol. 71, pp. 2895-2897, 1997.
4. P. V. Hoi, C. D. Thuy, B. Huy, and T. V. Luc, "The use of visible laser diode-fiber optic sensors in beverage industry and environment controls," Proc. SPIE, vol. 3000, pp. 45-50, 1997.
5. R. M. Knox and P. P. Toulios, Proceedings of MRI Symposium on Submillimeter Waves, J. Fox, Ed. Brooklyn, NY: Polytechnic, 1970.
6. M. K. Smit, E. C. M. Pennings, and H. Block, "A normalized approach to the design of low-loss optical waveguide bends," J. Lightwave Technol., vol. 11, pp. 1737-1742, 1993.
7. K. Wörhoff, P. V. Lambeck, H. Albers, N. F. van Hulst, O. F. J. Noordman, and Th. J. A. Popma, "Optimization of LPCVD silicon oxynitride to large refractive index homogeneity and layer thickness uniformity," Proc. SPIE, vol. 3099, pp. 257-268, 1997.
8. K. Wörhoff, A. Driessen, P. V. Lambeck, H. Albers, L. T. H. Hilderink, and Th. J. A. Popma, "PECVD silicon oxynitride optimized for application in integrated optics," Sensors & Actuators A, to be published.
9. O. Parriaux and G. J. Veldhuis, "Normalized analysis for the sensitivity optimization of integrated optical evanescent wave sensors," J. Lightwave Technol., vol. 16, pp. 573-582, 1998.
10. CRC Handbook of Chemistry and Physics, R. C. Weast, Ed., 53rd ed. Boca Raton, FL: CRC, 1972.