Scanning Auger microscopy study of electromigration induced failure in submicrometric microelectronic devices

Applied Surface Science

Volumn 144-145, Issue , 1999, Pages 329-333

  Santucci, S ^a   Lozzi, L ^a   Pacifico, D ^a   Alfonsetti, R ^b   Moccia, G ^b  

^a UNIVERSITY OF L'AQUILA   (Italy)

^b TEXAS INSTRUMENTS   (United States)

Author keywords

Electromigration; Scanning Auger Microscopy

Indexed keywords

ATOMS; ELECTRIC CONTACTS; ELECTRIC CURRENTS; ELECTROMIGRATION; ELECTRON TRANSPORT PROPERTIES; MICROELECTRONICS; MICROSCOPIC EXAMINATION; OPTICAL RESOLVING POWER;

CHEMICAL DISTRIBUTION; ELECTRIC TEST; ELECTRON FLOW; ELEMENTAL DISTRIBUTION; SCANNING AUGER MICROSCOPY; SPATIAL RESOLUTION; SUBMICROMETRIC MICROELECTRONIC DEVICES;

MICROELECTROMECHANICAL DEVICES;

EID: 0032624766     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00820-4     Document Type: Article

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