Evidence for a thermal mechanism in excimer laser ablation of thin film ZnS on Si

Journal of Applied Physics

Volumn 85, Issue 7, 1999, Pages 3855-3859

  Sands, D ^a   Wagner, F X ^a   Key, P H ^a  

^a UNIVERSITY OF HULL   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL METHODS; CORRELATION METHODS; EXCIMER LASERS; LASER ABLATION; LASER PULSES; MATHEMATICAL MODELS; SEMICONDUCTING SILICON; SEMICONDUCTING ZINC COMPOUNDS; SUBSTRATES; THERMAL CONDUCTIVITY OF SOLIDS; THERMAL DIFFUSION IN SOLIDS; THIN FILMS;

HEAT DIFFUSION EQUATIONS;

SEMICONDUCTING FILMS;

EID: 0032622275     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.369756     Document Type: Article

References (12)

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