Role of peripheral vacuum regions in the control of the electron cyclotron resonance plasma uniformity

Applied Physics Letters

Volumn 74, Issue 14, 1999, Pages 1972-1974

  Ueda, Yoko ^a   Muta, Hiroshi ^a,b   Kawai, Yoshinobu ^a  

^a KYUSHU UNIVERSITY   (Japan)

^b KITAKYUSHU NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; COMPUTER SIMULATION; CURRENT DENSITY; ELECTROMAGNETIC WAVE ABSORPTION; ELECTROMAGNETIC WAVE POLARIZATION; ELECTROMAGNETIC WAVE PROPAGATION IN PLASMA; ELECTRON CYCLOTRON RESONANCE; ELECTROSTATICS; MAGNETIC FIELD EFFECTS; MICROWAVES; PLASMA SOURCES; VACUUM;

ION SATURATION CURRENT DENSITY; PLASMA CHAMBERS; SOFTWARE PACKAGE TASK;

PLASMA FILLED WAVEGUIDES;

EID: 0032607209     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.123717     Document Type: Article

References (12)

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