High-density plasma production using a slotted helical antenna at high microwave power

Plasma Sources Science and Technology

Volumn 6, Issue 2, 1997, Pages 189-200

  Tarey, R D ^a   Jarwal, R K ^a   Ganguli, A ^a   Akhtar, M K ^b  

^a INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

^b JAMIA MILLIA ISLAMIA CENTRAL UNIVERSITY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTROMAGNETIC WAVE POLARIZATION; ELECTRON CYCLOTRON RESONANCE; ELECTRONS; HELICAL ANTENNAS; MAGNETIC FIELD EFFECTS; MICROWAVES; PLASMA DENSITY;

HIGH DENSITY PLASMA PRODUCTION;

PLASMAS;

EID: 0031145266     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/6/2/013     Document Type: Article

References (35)

1. Lisitano G, Ellis R A, Hooke W M and Stix T H 1968 Rev. Sci. Instrum. 39 295
2. Kawai Y and Sakamoto K 1982 Rev. Sci. Instrum. 53 606
3. Suetsgu Y and Kawai Y 1984 Japan. J. Appl. Phys. 23 237
4. Baskaran R 1988 PhD Thesis IIT New Delhi
5. Ganguli A, Baskaran R and Pandey H D 1990 IEEE Trans. Plasma Sci. PS-18 134
6. Ganguli A and Baskaran R 1990 J. Appl. Phys. 67 501
7. Lisitano G, Fontanesi M and Sindoni E 1970 Appl. Phys. Lett. 16 122
8. Kopecky V, Musil J and Zacek F 1975 Phys. Lett. 17 457
9. Muller G, Rauchle E and Staib W 1975 Phys. Lett. 54 261
10. Dionigi R D, Fontanesi M, Sindoni E and Lisitano G 1971 Appl. Phys. Lett. 19 19
11. Cano R and Zanfagna B 1973 Plasma Phys. 15 457
12. Uesugi Y, Takamura S and Okuda T 1982 Plasma Phys. 24 369
13. Lisitano G, Fontanesi M and Bernabei S 1971 Phys. Rev. Lett. 29 747
14. Appala Naidu P 1989 PhD Thesis IIT New Delhi
15. Ganguli A, Naidu P A and Tewari D P 1991 IEEE Trans. Plasma Sci. PS-19 433
16. Ganguli A, Appala Naidu P and Tewari D P 1989 Int. Conf. on Plasma Physics (New Delhi) vol 3, p 1177
17. Ganguli A, Jarwal R K, Tarey R D and Akhtar M K 1996 communicated
18. Jarwal R K 1996 PhD Thesis IIT New Delhi
19. Ganguli A and Appala Naidu P 1990 J. Appl. Phys. 68 3679
20. Ganguli A and Appala Naidu P 1986 J. Phys. D: Appl. Phys. 19 2265
21. Ganguli A, Appala Naidu P and Umesh G 1992 Int. Conf. on Plasma Physics (Innsbruck) vol 3, p 1943
22. Lam S H 1965 Phys. Fluids 8 73
23. Chen F F 1965 Plasma Diagnostic Techniques ed R H Huddlestone and S L Leonard (New York: Academic)
24. Hutchinson I H 1987 Principles of Plasma Diagnostics (New York: Cambridge University Press)
25. Ganguli A and Tarey R D 1995 An Interactive Graphics Based Software Package for Processing and Analyzing Langmuir Probe Data
26. Brown S C 1967 Basic Data of Plasma Physics 2nd edn (Cambridge, MA: MIT)
27. Akhtar M K 1996 private communication
28. Chen F F 1995 IEEE Trans. Plasma Sci. PS-23 20
29. Chen F F and Chevalier G 1992 J. Vac. Sci. Technol. A 10 1389
30. Sudit I D and Chen F F 1994 Bull. Am. Phys. Soc. 39 1727
31. Boswell R W 1970 Phys. Lett. 33 457
32. Perry A J, Vender D and Boswell R W 1991 J. Vac. Sci. Technol. B 9 310
33. Komori A, Shoji T, Miyamoto K, Kawai J and Kawai Y 1991 Phys. Fluids B 3 893
34. Tanaka M, Nishimoto R, Harada N, Komori A and Kawai Y 1989 Int. Conf. on Plasma Physics (New Delhi) vol 3, p 1225
35. Komori A, Takada Y, Yonesu A and Kawai Y 1989 Int. Conf. on Plasma Physics (New Delhi) vol 3, p 1197