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Diamond and Related Materials

Volumn 8, Issue 2-5, 1999, Pages 382-385

Synthesis of adhesive c-BN films in pure nitrogen radio-frequency plasma

(5) Yap, Y K a Aoyama, T a Kida, S a Mori, Y a Sasaki, T a

a OSAKA UNIVERSITY (Japan)

Author keywords

Adhesion; C BN films; Ion assisted deposition; Sp2 bonded BN

Indexed keywords

ADHESION; CHEMICAL BONDS; CUBIC BORON NITRIDE; DEPOSITION; FILM PREPARATION; NITROGEN; PLASMA APPLICATIONS; PULSED LASER APPLICATIONS; RADIATION DAMAGE; SILICON; SYNTHESIS (CHEMICAL); THIN FILMS;

RADIOFREQUENCY PLASMA PULSED LASER DEPOSITION;

PROTECTIVE COATINGS;

EID: 0032607043 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/s0925-9635(98)00375-6 Document Type: Article

Times cited : (15)

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