Straightness measurements by use of a reflection confocal optical system

Applied Optics

Volumn 38, Issue 25, 1999, Pages 5310-5318

  Matsuda, Kiyofumi ^a   Roy, Maitreyee ^a   O’byrne, John W ^a   Fekete, Pal W ^a   Eiju, Tomoaki ^b   Sheppard, Colin J R ^a  

^a UNIVERSITY OF SYDNEY   (Australia)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT REFLECTION; MATHEMATICAL MODELS; MIRRORS; OPTICAL ROTATION; OPTICAL SENSORS; OPTICAL SYSTEMS;

DISPLACEMENT MEASUREMENT; REFLECTION CONFOCAL OPTICAL SYSTEMS; STRAIGHTNESS MEASUREMENT;

ANGLE MEASUREMENT;

EID: 0032606849     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.38.005310     Document Type: Article

References (8)

1. Hewlett-Packard, H Laser Precision Measurement System 5526A Operating Manual (Hewlett Packard, 3000 Hanover Street, Palo Alto, Calif. 94304-1185, 1976).
2. J. M. Burch and D. C. Williams, “A focal lens systems for straightness measurement,” Opt. Laser Technol. 6, 166-168 (1974).
3. K. Matsuda, K. Tenjinbayashi, T. Kohno, and T. Eiju, “Straightness measurement using holographic real time interferometry,” in International Commission for Optics-13 Conference Digest, H. Ohzu, ed. (Organizing Committee of ICO-13, Sapporo, Hokkaido, Japan, 1984), pp. 316-317.
4. K. Takada and H. Takeyama, “Accuracy control of machine-tool by means of independent optical axes,” Ann. CIRP 27, 271-276 (1978).
5. H. H. Sakuma and H. Wada, “Straightness measurement using a heterodyne moire method,” Precis. Eng. 9, 19-22 (1987).
6. “A new laser-based straightness measuring system,” Machin. Product. Eng. 15 July 1975, pp. 62-63.
7. N. Ikawa, S. Shimada, and H. Morooka, “Laser beam as a straight datum and its application to straightness measurement at nanometer level,” Ann. CIRP 37, 523-526(1998).
8. M. Yamauchi and K. Matsuda, “Interferometric straightness measurement system using a holographic grating,” Opt. Eng. 33, 1078-1083 (1994).