Laser Beam as a Straight Datum and Its Application to Straightness Measurement at Nanometer Level

CIRP Annals - Manufacturing Technology

Volumn 37, Issue 1, 1988, Pages 523-526

  Ikawa, Naoya ^a  

^a Shoichi Shimada and Hideyuki Morooka ^*

Author keywords

flatness measurement; laser beam datum; nanometer resolution; straight datum; straightness measurement

Indexed keywords

EID: 0005838826     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)61692-8     Document Type: Article

References (2)

1. Calibration and Use of Optical Straightedges in the Metrology of Precision Machines
2. High Precision Optical Surface Sensor (HIPOSS-1)