Influence of deposition parameters on mechanical properties of sputter-deposited Cr2O3 thin films

Journal of Materials Research

Volumn 14, Issue 9, 1999, Pages 3623-3629

  Hones, P ^a   Levy F ^a   Randall, N X ^b  

^a EPFL   (Switzerland)

^b CSEM   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; CHROMIUM COMPOUNDS; CRACK INITIATION; DELAMINATION; ELASTIC MODULI; FRICTION; HARDNESS; MAGNETRON SPUTTERING; OXIDES; SPUTTER DEPOSITION; THIN FILMS;

CHROMIUM OXIDE; NANOINDENTATION TECHNIQUES;

PROTECTIVE COATINGS;

EID: 0032595545     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1999.0489     Document Type: Article

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