Transport in split gate MOS quantum dot structures

Microelectronic Engineering

Volumn 47, Issue 1, 1999, Pages 123-125

  Gunther, A D ^a   Goodnick, S M ^a   Khoury, M ^a   Krishnaswamy, A E ^a   Rack, M J ^a   Thornton, T J ^a  

^a ARIZONA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTANCE; ELECTRON BEAM LITHOGRAPHY; MICROELECTRONIC PROCESSING; MOSFET DEVICES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; SURFACE STRUCTURE; TRANSPORT PROPERTIES;

COULOMB BLOCKADE; CROSSING BEHAVIOR; DEPLETION GATES; MAGNETOTRANSPORT MEASUREMENTS; SPLIT GATE TECHNIQUE;

SEMICONDUCTOR QUANTUM DOTS;

EID: 0032594693     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(99)00167-7     Document Type: Article

References (9)

1. H. Matsuoka, T. Ichiguchi, T. Yoshimura, and E. Takeda, J. Appl. Phys. 76 (1994) 5561.
2. H. Matsuoka and S. Kimura, Jpn. J.Appl. Phys. 34 (1995) 1326.
3. M. Khoury, A. Gunther, D. P. Pivin Jr., M. J. Rack, and D. K. Ferry, Jpn. J. Appl. Phys., in press.
4. H. Matsuoka, T. Ichiguchi, T. Yoshimiura and E. Takeda J. Appl. Phys. 76 (1994) 5561
5. E. Leobandung, L. Gua, Y. Wang, and S. Chou, Appl. Phys. Lett. 67 (1995) 983; E. Leobandung, L. Gua, Y. Wang, and S. Chou, ibid. 67 (1995) 2338; L. Zhuang, L. Gua, and S. Chou, ibid. 72 (1998) 1205.
6. E. Leobandung, L. Gua, Y. Wang, and S. Chou, Appl. Phys. Lett. 67 (1995) 983; E. Leobandung, L. Gua, Y. Wang, and S. Chou, ibid. 67 (1995) 2338; L. Zhuang, L. Gua, and S. Chou, ibid. 72 (1998) 1205.
7. E. Leobandung, L. Gua, Y. Wang, and S. Chou, Appl. Phys. Lett. 67 (1995) 983; E. Leobandung, L. Gua, Y. Wang, and S. Chou, ibid. 67 (1995) 2338; L. Zhuang, L. Gua, and S. Chou, ibid. 72 (1998) 1205.
8. M. Khoury, A. Gunther, D. P. Pivin, M. J. Rack, and D. K. Ferry, Nanotechnology, in press.
9. D. K. Ferry and S. M. Goodnick, Transport in Nanostructures (Cambridge, New York, 1997).