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Diamond and Related Materials

Volumn 5, Issue 10, 1996, Pages 1171-1184

Optical emission diagnostics and film growth during microwave-plasma-assisted diamond CVD

(4) Lang, T a Stiegler, J a Von Kaenel, Y a Blank, E a

a EPFL (Switzerland)

Author keywords

Atomic hydrogen; Emission spectroscopy; Gas and substrate temperature; Microstructure

Indexed keywords

EID: 0001051773 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/0925-9635(96)00537-7 Document Type: Article

Times cited : (47)

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