SCOPUS 정보 검색 플랫폼

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 4 SUPPL. B, 1996, Pages 2516-2519

Low temperature synthesis of diamond films with electron cyclotron resonance plasma chemical vapor deposition

(5) Mantei, Thomas D a Ring, Zoltan a,c Schweizer, Mark a,d Tlali, Spirit b Jackson, Howard E b

a University of Cincinnati (United States)

b UNIVERSITY OF CINCINNATI (United States)

c MCNC (United States)

d USA (United States)

Author keywords

Diamond synthesis; ECR; Low temperature; Plasma CVD

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DISSOCIATION; ELECTRON CYCLOTRON RESONANCE; IONIZATION; LOW TEMPERATURE OPERATIONS; MAGNETIC FIELDS; MICROWAVES; PHONONS; POLYCRYSTALLINE MATERIALS; SYNTHESIS (CHEMICAL);

DEPOSITION CHAMBER; DIAMOND SYNTHESIS; MICROWAVE DISCHARGE; TORR PRESSURE;

DIAMOND FILMS;

EID: 0030125046 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.35.2516 Document Type: Article

Times cited : (6)

References (13)

1
- 5244244649
- eds. R. E. Clausing et al. Plenum, New York
- M. N. Yoder: Diamond and Diamond-Like Films and Coatings, eds. R. E. Clausing et al. (Plenum, New York, 1991) pp. 1-16.
- (1991) Diamond and Diamond-Like Films and Coatings , pp. 1-16
- Yoder, M.N.¹

2
- 0024610549
- K. E. Spear: J. Am. Ceram. Soc. 72 (1989) 171.
- (1989) J. Am. Ceram. Soc. , vol.72 , pp. 171
- Spear, K.E.¹

3
- 0023591324
- R. C. DeVries: Ann. Rev. Mater. Sci. 17 (1987) 161.
- (1987) Ann. Rev. Mater. Sci. , vol.17 , pp. 161
- DeVries, R.C.¹

4
- 5244326572
- S. Jin, M. Fanciulli, D. Jong, Y. He and T. D. Moustakas: SPIE Proc. 1759 (1992) 116.
- (1992) SPIE Proc. , vol.1759 , pp. 116
- Jin, S.¹ Fanciulli, M.² Jong, D.³ He, Y.⁴ Moustakas, T.D.⁵

5
- 84957123047
- Y. Muranaka, H. Yamashita and H. Miyadera: J. Vac. Sci. & Technol. A 9 (1991) 76.
- (1991) J. Vac. Sci. & Technol. A , vol.9 , pp. 76
- Muranaka, Y.¹ Yamashita, H.² Miyadera, H.³

6
- 0025519001
- Y. Liou, A. Inspektor, R. Weimer, D. Knight and R. Messier: J. Mater. Res. 5 (1990) 2305.
- (1990) J. Mater. Res. , vol.5 , pp. 2305
- Liou, Y.¹ Inspektor, A.² Weimer, R.³ Knight, D.⁴ Messier, R.⁵

7
- 0347800063
- Y. Liou, A. Inspektor, D. Knight, R. Weimer, D. Pickrell, A. R. Badzian and R. Messier: SPIE Proc. 1146 (1989) 12.
- (1989) SPIE Proc. , vol.1146 , pp. 12
- Liou, Y.¹ Inspektor, A.² Knight, D.³ Weimer, R.⁴ Pickrell, D.⁵ Badzian, A.R.⁶ Messier, R.⁷

8
- 0028419876
- Y. Muranaka, H. Yamashita and H. Miyadera: Diam. Rel. Technol. 3 (1994) 313.
- (1994) Diam. Rel. Technol. , vol.3 , pp. 313
- Muranaka, Y.¹ Yamashita, H.² Miyadera, H.³

9
- 5244271399
- K. E. Spear, M. Frenklach, A. Badzian, T. Badzian and R. Messier: Ceram. Eng. Sci. Proc. 9 (1988) 1095.
- (1988) Ceram. Eng. Sci. Proc. , vol.9 , pp. 1095
- Spear, K.E.¹ Frenklach, M.² Badzian, A.³ Badzian, T.⁴ Messier, R.⁵

10
- 21144480750
- T. D. Mantei and J. J. Chang: J. Vac. Sci. & Technol. A 10 (1992) 1423.
- (1992) J. Vac. Sci. & Technol. A , vol.10 , pp. 1423
- Mantei, T.D.¹ Chang, J.J.²

11
- 21844514953
- A. Saproo and T. D. Mantei: J. Vac. Sci. & Technol. A 13 (1995) 883.
- (1995) J. Vac. Sci. & Technol. A , vol.13 , pp. 883
- Saproo, A.¹ Mantei, T.D.²

12
- 36449006277
- Z. Ring, T. D. Mantei, S. Tlali and H. E. Jackson: Appl. Phys. Lett. 66 (1995) 3380.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 3380
- Ring, Z.¹ Mantei, T.D.² Tlali, S.³ Jackson, H.E.⁴

13
- 0037921722
- Z. Ring, T. D. Mantei, A. G. Choo and H. E. Jackson: Appl. Phys. Lett. 65 (1994) 121.
- (1994) Appl. Phys. Lett. , vol.65 , pp. 121
- Ring, Z.¹ Mantei, T.D.² Choo, A.G.³ Jackson, H.E.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.