Chemical vapor deposition of barium strontium titanate thin films by the direct liquid injection of Ba(methd)2, Sr(methd)2, and Ti(mpd)(tmhd)2without solvent

Electrochemical and Solid-State Letters

Volumn 2, Issue 10, 1999, Pages 510-511

  Lee, Jung Hyun ^a   Rhee, Shi Woo ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM TITANATE; CHEMICAL VAPOR DEPOSITION; STRONTIUM COMPOUNDS; THERMAL EFFECTS; THIN FILMS; VISCOSITY OF LIQUIDS; X RAY PHOTOELECTRON SPECTROSCOPY;

BARIUM STRONTIUM TITANATE; DIRECT LIQUID INJECTION;

DIELECTRIC FILMS;

EID: 0032594196     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1390886     Document Type: Article

References (7)

1. C. S. Kang, H. J. Cho, C. S. Hwang, and B. T. Lee, Jpn. J. Appl. Phys., 36, 6946 (1997).
2. T. Kawara, M. Yamamuka, T. Matika, K. Tsutahara, A. Yuuki, K. Ono, and Y. Maturi, Jpn. J. Appl. Phys., 33, 5897 (1994).
3. R. Gardiner, D. Brown, P. Kirlin, and A. Rheingold, Chem. Mater., 3, 1053 (1991).
4. R. Gardiner, G. Douglas, S. Gregory, and V. Brian, Chem. Mater., 6, 1967 (1994).
5. J. H. Lee and S. W. Rhee, J. Electrochem. Soc., Accepted for publication.
6. J. H. Lee and S. W. Rhee, J. Mater. Res., Accepted for publication.
7. J. H. Lee, M. Y. Park, and S. W. Rhee, Chem. Mater., Submitted.