Development of a six-component miniature force sensor for robotic applications

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 58, Issue , 1996, Pages 753-760

  Jin, W L ^a   Mote Jr , C D ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; MACHINING; ROBOTICS; SILICON NITRIDE; STIFFNESS; STRAIN GAGES;

FORCE SENSOR; MICROFABRICATION; PRECISION MACHINING;

SILICON SENSORS;

EID: 0030379432     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)