Fabrication of a low-operating voltage diamond thin film metal-semiconductor-metal photodetector by laser writing lithography

Applied Physics Letters

Volumn 72, Issue 10, 1998, Pages 1131-1133

  Jiang, Wei ^a   Ahn, Jaeshin ^a   Xu, Feng Lan ^a   Liaw, Chin Yi ^a   Chan, Yuen Chuen ^a   Zhou, Yan ^a   Lam, Yee Loy ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; ELECTRODES; FILM GROWTH; GRAIN SIZE AND SHAPE; IMAGE PROCESSING; INCLUSIONS; PHOTOLITHOGRAPHY; POLYCRYSTALLINE MATERIALS; RELIABILITY; SEMICONDUCTOR DEVICE STRUCTURES; THIN FILMS;

DIAMOND GRAINS; LASER WRITING LITHOGRAPHY; POLYCRYSTALLINE FILMS; SACRIFICIAL LAYER INCLUSION;

ULTRAVIOLET DETECTORS;

EID: 0032498766     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120992     Document Type: Article

References (6)

1. The Properties of Diamond, edited by J. E. Field (Academic, New York, 1979).
2. L. S. Pan, D. R. Kania, P. Pianetta, M. Landstrass, O. L. Landen, and L. S. Plano, Surf. Coat. Technol. 47, 356 (1991).
3. M. Franklin, A. Fry, K. K. Gan, S. Han, H. Kagan, S. Kanda, D. Kania, R. Kass, S. K. Kim, R. Malchow, F. Morrow, S. Olsen, W. F. Palmer, L. S. Pan, F. Sannes, and S. Schnetzer, Nucl. Instrum. Methods Phys. Res. A 315, 39 (1992).
4. S. M. Chan, R. D. McKeag, M. D. Whitfield, and R. B. Jackman, Phys. Status Solidi A 154, 445 (1996).
5. B. Schulte, H. Juergensen, P. Blackborow, and E. Sevillano, Surf. Coat. Technol. 75, 634 (1995).
6. F. L. Xu, C. Y. Liaw, Y. C. Chan, Y. Zhou, and Y. L. Lam, Technical Digest of the Pacific Rim Conference on Lasers and Electro-Optics, Japan, paper No. FG3 (1997), p. 263.