Development and applications of a laser writing lithography system with alignment capability

Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Volumn , Issue , 1997, Pages 263-264

  Xu, Feng Lan ^a   Liaw, Chi Yi ^a   Chan, Yuen Chuen ^a   Zhou, Yan ^a   Lam, Yee Loy ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY; OPTOELECTRONIC DEVICES; SUBSTRATES;

LASER WRITING LITHOGRAPHY SYSTEM;

PULSED LASER APPLICATIONS;

EID: 0030692861     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)