Direct deposition of silica films using silicon alkoxide solution

Journal of Non-Crystalline Solids

Volumn 241, Issue 2-3, 1998, Pages 91-97

  Oh, Junrok ^a   Imai, Hiroaki ^a   Hirashima, Hiroshi ^a  

^a KEIO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; FILM GROWTH; NUCLEATION; SOLUTIONS; SUBSTRATES; THIN FILMS;

DEPOSITED SILICA FILMS; SILICON ALKOXIDE;

SILICA;

EID: 0032476411     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(98)00772-8     Document Type: Article

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