Composition study of high temperature sputtered amorphous GaxAs1-x films

Journal of Non-Crystalline Solids

Volumn 238, Issue 3, 1998, Pages 253-258

  Seguin, Jean Luc ^a   El Hadadi, Benachir ^b   Carchano, Hervé ^a   Aguir, Khalifa ^a  

^a AIX MARSEILLE UNIVERSITY   (France)

^b FACULTÉ DES SCIENCES ET TECHNIQUES GUÉLIZ   (Morocco)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; COMPOSITION; EVAPORATION; GLASS; HIGH TEMPERATURE EFFECTS; MOLYBDENUM; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM COMPOUNDS; SPUTTER DEPOSITION; STOICHIOMETRY; SUBSTRATES; THERMAL CONDUCTIVITY;

INDIUM TIN OXIDE;

SEMICONDUCTING FILMS;

EID: 0032475357     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(98)00689-9     Document Type: Article

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