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Volumn 38, Issue 1, 1997, Pages 17-24
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Use of infrared imagery in characterization of chemical vapor deposition reactors
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Author keywords
Chemical vapor deposition; Gas dynamics; Infrared; Photogrammetry
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Indexed keywords
BOUNDARY CONDITIONS;
CHEMICAL REACTORS;
CHEMICAL VAPOR DEPOSITION;
FLOW PATTERNS;
GAS DYNAMICS;
HYDROGEN;
NITROGEN;
PHOTOGRAMMETRY;
THERMAL MAPS;
INFRARED IMAGING;
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EID: 0031061873
PISSN: 13504495
EISSN: None
Source Type: Journal
DOI: 10.1016/S1350-4495(96)00023-0 Document Type: Article |
Times cited : (5)
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References (3)
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