Low energy ion beam assisted deposition of biaxially aligned yttria stabilized zirconia films on polycrystalline Ni-Cr alloy

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 135, Issue 1-4, 1998, Pages 492-500

  Mao, Y J ^a   Jiang, B Y ^a   Ren, C X ^a   Liu, X H ^a   Zou, S C ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Biaxial alignment; IBAD; YSZ

Indexed keywords

COMPUTER SIMULATION; CRYSTAL ORIENTATION; ION BEAMS; ION BOMBARDMENT; MONTE CARLO METHODS; NICKEL ALLOYS; POLYCRYSTALLINE MATERIALS; SPUTTER DEPOSITION; SYNTHESIS (CHEMICAL); ZIRCONIA;

ION BEAM ASSISTED DEPOSITION (IBAD); YTTRIA STABILIZED ZIRCONIA;

SUPERCONDUCTING FILMS;

EID: 0032472635     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00655-1     Document Type: Article

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