Surface micromachined devices for microwave and photonic applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3419, Issue , 1998, Pages 214-226

  Chang, M Frank ^a   Wu, Ming C ^a   Yao, J Jason ^a   Motamedi, M Edward ^a  

^a University of California   (United States)

Author keywords

3 D Fary Perot; Actuators; FDDI; Integration; MEMS; Microlens; Microoptics; Microwave swtches; Mirror; MOEM

Indexed keywords

ETALONS; FREQUENCIES; MICROACTUATORS; MICROLENSES; MICROMACHINING; MICROWAVE DEVICES; MIRRORS; OPTICAL BEAM SPLITTERS; OPTOELECTRONIC DEVICES; SWITCHES;

SURFACE MICROMACHINED DEVICES;

MICROELECTROMECHANICAL DEVICES;

EID: 0032402929     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.311012     Document Type: Conference Paper

References (10)

1. GaAs FET RF switches
2. Monolithic GaAs HBT p-I-n diode variable gain amplifiers, attenuators, and switches
3. A surface micromachined miniature switch for telecommunication applications with signal frequencies from DC up to 4 GHz
4. Binary optics thin film microlens array
5. FPAs and thin film binary optic microlens integration
6. Microfabricated hinges
7. Three-dimensional micro-fresnel optical elements fabricated
8. Tunable three-dimensional solid Fabry-Perot etalons fabricated by surface-micromachining
9. Surface-micromachined tunable three-dimensional solid Fabry-Perot etalons with dielectric coatings
10. A silicon-based moving-mirror optical switch