Measuring the size and intensity distribution of SEM beam spot

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3332, Issue , 1998, Pages 132-137

  Goldenshtein, Alex ^a   Gold, Yaron I ^a   Chayet, Haim ^a  

^a Applied Materials Inc Israel   (Israel)

Author keywords

Beam width; Knife edge aperture; Signal to noise ratio...

Indexed keywords

ASPECT RATIO; SCANNING ELECTRON MICROSCOPY; SIGNAL DETECTION; SIGNAL TO NOISE RATIO; THIN FILMS;

INTENSITY DISTRIBUTION;

ELECTRON BEAMS;

EID: 0032402674     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.308723     Document Type: Conference Paper

References (6)

1. Advanced metrology advisory group, unified advanced CD-SEM specification for sub-0.18 μm technology
2. SEM image sharpening by reversing the effect of non-ideal beam spot