SEM image sharpening by reversing the effect of non-ideal beam spot

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3332, Issue , 1998, Pages 620-624

  Gold, Yaron I ^a   Goldenshtein, Alex ^a  

^a Applied Materials Inc Israel   (Israel)

Author keywords

Contrast to noise ratio; De convolution; Electron beam spot; Image processing; Resolution; Scanning Electron Microscope (SEM); Sharpening

Indexed keywords

ALGORITHMS; COMPUTATIONAL COMPLEXITY; ELECTRON BEAMS; OPTICAL RESOLVING POWER; SCANNING ELECTRON MICROSCOPY;

DE-CONVOLUTION;

IMAGE PROCESSING;

EID: 0032403905     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.308774     Document Type: Conference Paper

References (2)

1. Measuring the size and intensity of SEM beam spot
2. A practical resolution standard for in-line CD-SEM systems