Implementation of a closed-loop CD and overlay controller for sub-0.25 μm patterning

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3332, Issue , 1998, Pages 461-470

  Sturtevant, John ^a   Weilemann, Michele ^a   Green, Kent ^a   Dwyer, John ^a   Robertson, Eric ^a   Hershey, Rob ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; ERROR ANALYSIS; MASKS; OPTICAL RESOLVING POWER; OPTICAL SENSORS;

OVERLAY CONTROLLERS;

PHOTOLITHOGRAPHY;

EID: 0032401423     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.308788     Document Type: Conference Paper

References (5)