Planarization technology of a-Si:H TFTs for AM-LCDs

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3421, Issue , 1998, Pages 170-182

  Lan, Je Hsiung ^a   Kanicki, Jerzy ^a  

^a University of Michigan   (United States)

Author keywords

Active matrix liquid crystal display; Ar treatment; BCB; Cu gate; High aperture ratio; Large area; Planarization; Thin film transistor

Indexed keywords

AMORPHOUS SILICON; ARRAYS; CROSSTALK; DIELECTRIC PROPERTIES; PASSIVATION; THIN FILM TRANSISTORS;

PLANARIZATION TECHNOLOGY;

LIQUID CRYSTAL DISPLAYS;

EID: 0032401421     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.311061     Document Type: Conference Paper

References (19)

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